Principal Researcher – Metrology Sensor Physics & Applications

Introduction

Within ASML Research Metrology department, the Computational Methods for Metrology and Sensors(CMMS) group develops physics‑based simulations to model, study and assess metrology sensors in their application and inference methods that convert raw metrology sensor signals into manufacturing‑critical parameters. We are looking for a Principal Researcher – Metrology Sensor Physics & Applications.

Job mission

In this role, you will shape application‑driven research by combining a deep understanding of metrology use cases with first‑principles sensor physics. You will work in one or few research projects, developing physical models, simulations, and algorithms that are relevant and impactful for current and future ASML metrology solutions.

You will act as a technical authority at the interface of applications, sensor physics, and algorithms, influencing research direction and quality beyond a single project.

Key Responsibilities

• Define and drive application‑relevant metrology research topics within competences of CMMS group.

• Develop, assess, and validate sensor‑physics simulations, including:

  • Light propagation through optical systems

  • Scattering and diffraction from structured targets

  • Signal formation and sensitivity mechanisms

• Build fundamental understanding of parameter inference, including observability, limitations, uncertainties, and trade‑offs.

• Take ownership of high‑priority research topics, from problem formulation through feasibility studies and proof‑of‑concept results.

• Contribute to research projects, combining topic leadership with technical review and guidance.

• Act as a technical reference for application‑driven sensor modeling within Research and towards Development & Engineering and Applications, guide and coach more junior group members.

• Autonomously interacts with senior stakeholders within and outside of Research. Advises, challenges, and educates Product System Engineers, Development & Engineering (D&E), and Research senior management. Contributes to external research programs and collaborates with suppliers and academic partners.

• Acts as a quartermaster in a dynamic environment by developing processes and ways of working that enable effective and efficient innovation for the team.

  Shapes the development of Research solutions. Has significant impact on the work of multiple colleagues by acting as a technical and content lead, and by mentoring and coaching others.

Education and Experience

• PhD or equivalent experience in physics, optics, applied mathematics, or a closely related field.

• Strong understanding of metrology use cases and their role in semiconductor manufacturing circle.

• Proven experience with physics‑based simulation of optical or scattering‑based sensors.

• Ability to translate physical insight into robust inference algorithms.

Personal Skills

• Comfortable operating with high autonomy and technical responsibility.

• Proven ability to collaborate with people with different backgrounds and different levels of expertise.

• Innovation & Problem solving skills.

Context of position 

Within ASML, the sector Research is responsible for creating ideas and solutions that contribute to the ASML roadmaps.  

. We work in small teams and deliver proof of concept solutions that can be transferred to Development & Engineering. We intensively collaborate with external research institutes and universities.