Physics | Engineering internship: predictive imaging diagnostics

Introduction

Within the Customer Support Applications Business Support (CS ABS) department in Veldhoven, you will join a team dedicated to keeping advanced lithography systems performing at their best in customer fabs worldwide.

When on-product performance issues arise, for example when printed feature dimensions on a chip deviate from specification, it is our role, together with local support teams around the world, to identify the root cause and ensure the issue is resolved. This requires investigating a wide range of scanner characteristics, including aberrations, focus, dose, illumination, and many other system parameters that influence imaging performance.

Your Assignment

In this internship, you will focus on making root-cause analysis faster, more efficient, and more predictive. Because more than 30 scanner subsystems can influence imaging performance, collecting, analyzing, and visualizing performance qualification data must be highly automated.

You will develop methods to consolidate key performance indicators into an intuitive dashboard and investigate statistical approaches to quickly identify deviations by comparing scanner behavior against a population of reference systems.

In addition, different customer chip layouts and pattern types exhibit varying sensitivities to scanner deviations. You will explore how simulated or calculated on-product sensitivities can be combined with scanner performance data to predict the impact on product performance and identify the most likely contributors to a performance issue. Your main responsibilities will be:

• Develop an automated dashboard to collect, analyze, and visualize scanner performance data.

• Explore statistical methods for automated outlier detection within a scanner population.

• Apply scanner sensitivity models to translate scanner performance metrics into expected on-product performance and improve prediction accuracy.

• Develop, validate, and roll out the solution for global use by ASML imaging engineers.

During this assignment, you will gain valuable knowledge of photolithography imaging physics and collaborate with technical experts across Customer Support (CS) and Development & Engineering (D&E). In addition, you will further develop your communication and stakeholder management skills by introducing and deploying the solution to colleagues across CS and multiple ASML sites worldwide.

This is a master's-level internship (non-thesis) with a minimum duration of five months. The internship requires a minimum commitment of 24 hours (= 3 days) per week, including approximately 3 days on-site. The start date is flexible, with a preferred start date of October 2026.

Your Profile

To be successful in this internship, you:

• Are a master's student in Physics, Electrical Engineering, Mechanical Engineering, Aerospace Engineering, or a related technical field.

• Have experience with data analysis and are comfortable working with complex datasets.

• Have programming or scripting experience in any language, preferably MATLAB, or are motivated to learn MATLAB.

• Demonstrate strong analytical thinking and enjoy solving complex technical problems.

• Communicate effectively in English (C1) and collaborate well in an international environment.

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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