Physics | Data Science internship: wafer defectivity analysis

Introduction

The EUV Wafer Defectivity team at ASML focuses on improving wafer quality in advanced lithography systems. In this internship you will help uncover how defects impact system performance. The team uses diagnostic data to trace defect sources and prevent recurring issues. Your work in this internship will combine data analysis and machine learning. This internship offers a hands-on opportunity to contribute to real engineering improvements.

Your assignment

In this internship you will study defectivity metrics and connect them to system performance indicators. You will work with large datasets and explore machine learning methods to identify patterns and root causes. Your insights will support engineers in improving system reliability and performance. 
Your main responsibilities will be:

• Collect and structure wafer defectivity data and system performance indicators

• Analyze defectivity metrics such as size and material composition

• Apply statistical analysis to identify trends and correlations

• Explore machine learning techniques to detect patterns and root causes

• Collaborate with engineers and stakeholders to interpret data insights

• Support performance analysis through data-driven recommendations

• Present findings clearly to support technical decision-making

This is a master non-thesis internship for 6 months, 5 days per week (3-4 days on-site). The start date of this internship is as of September 2026.

Your profile

To be suitable for the internship, you:

• Are pursuing a master’s degree in data science, physics, materials science, or a related field

• Have experience with machine learning and statistical analysis techniques

• Are analytical and able to structure complex datasets into clear insights

• Communicate clearly in English, both written and verbal

• Are proactive, collaborative, and comfortable working with diverse stakeholders

• Have experience with MATLAB

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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